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authFullName_s : Jean-François Lelièvre

Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for Photovoltaics

Françoise F. Massines , José Silva , Jean-François Lelièvre , Rémy Bazinette , Julien Vallade , et al.
Plasma Processes and Polymers, 2016, 13 (1), p. 170-180. ⟨10.1002/ppap.201500182⟩
Journal articles istex hal-01311830v1

Atmospheric Pressure Radio-Frequency DBD Deposition of Dense Silicon Dioxide Thin Film

Rémy Bazinette , Jean H. Paillol , Jean-François Lelièvre , Françoise F. Massines
Plasma Processes and Polymers, 2016, 13 (10), pp.1015-1024 ⟨10.1002/ppap.201600038⟩
Journal articles istex hal-01467655v1