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Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for PhotovoltaicsPlasma Processes and Polymers, 2016, 13 (1), p. 170-180. ⟨10.1002/ppap.201500182⟩
Journal articles
istex
hal-01311830v1
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Atmospheric Pressure Radio-Frequency DBD Deposition of Dense Silicon Dioxide Thin FilmPlasma Processes and Polymers, 2016, 13 (10), pp.1015-1024 ⟨10.1002/ppap.201600038⟩
Journal articles
istex
hal-01467655v1
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