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authFullName_s : Julien Vallade

Feasibility of Antireflection and Passivation Coatings by Atmospheric Pressure PECVD

José Silva , Anatolii Lukianov , Rémy Bazinette , Danièle Blanc-Pélissier , Julien Vallade , et al.
Energy Procedia, 2014, 55, pp.741-749. ⟨10.1016/j.egypro.2014.08.054⟩
Journal articles hal-02063279v1

Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for Photovoltaics

Françoise F. Massines , José Silva , Jean-François Lelièvre , Rémy Bazinette , Julien Vallade , et al.
Plasma Processes and Polymers, 2016, 13 (1), p. 170-180. ⟨10.1002/ppap.201500182⟩
Journal articles istex hal-01311830v1

Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH4/NH3 mixture

Julien Vallade , Rémy Bazinette , Laura Gaudy , Françoise F. Massines
Journal of Physics D: Applied Physics, 2014, 47 (22), ⟨10.1088/0022-3727/47/22/224006⟩
Journal articles hal-01223237v1