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Efficient silicon nitride SiN x :H antireflective and passivation layers deposited by atmospheric pressure PECVD for silicon solar cellsProgress in Photovoltaics, 2018, 27 (11), pp.1007-1019. ⟨10.1002/pip.3141⟩
Journal articles
hal-02409765v1
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Feasibility of Antireflection and Passivation Coatings by Atmospheric Pressure PECVDEnergy Procedia, 2014, 55, pp.741-749. ⟨10.1016/j.egypro.2014.08.054⟩
Journal articles
hal-02063279v1
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Hydrogenated Silicon Nitride SiNx:H Deposited by Dielectric Barrier Discharge for PhotovoltaicsPlasma Processes and Polymers, 2016, 13 (1), p. 170-180. ⟨10.1002/ppap.201500182⟩
Journal articles
istex
hal-01311830v1
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